Brooks-instrument Mfi Series Instrukcja Użytkownika Pobierz pdf (Strona 6)

Brooks

Mf Series

Contents Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Figure Page

Number Number

1-1 Principle of Operation.................................................................................................................1-2

1-2 Maximum Allowable Output Loop Resistance ............................................................................1-5

1-3 Terminal Strip Labeling...............................................................................................................1-6

1-4 Mf Series Typical Hookup to Brooks 0151i Power Supply..........................................................1-6

1-5 Model Mf50 Controller Dimensions ............................................................................................1-7

1-6 Model Mf51 Controller Dimensions ............................................................................................1-7

1-7 Model Mf53 Controller Dimensions ............................................................................................1-8

1-8 Model Mf53 Controller with Flange Dimensions.........................................................................1-8

1-9 Model Mf60 Meter Dimensions ..................................................................................................1-9

1-10 Model Mf61 Meter Dimensions ..................................................................................................1-9

1-11 Model Mf63 Meter Dimensions .................................................................................................1-10

1-12 Model Mf63 Meter with Flange Dimensions ..............................................................................1-10

2-1 Common Electrical Hookups......................................................................................................2-6

2-2 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)......2-7

2-3 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) .............2-7

3-1 Flow Sensor Operational Diagram .............................................................................................3-2

3-2 Flow Control System Block Diagram..........................................................................................3-3

3-3 Mf Series Calibration Connections.............................................................................................3-5

3-4 Adjustment Potentiometer Location ...........................................................................................3-5

3-5 PC Board Jumper Location & Function ......................................................................................3-6

3-6 Fast Response Adjustment ........................................................................................................3-8

4-1 Torque Sequence for the Valve Retainer Plate (Controller)........................................................4-5

4-2 Voltmeter Connections for Valve Adjustment .............................................................................4-9

4-3a Valve Adjusting Spacer Locations (Normally Closed Valve) .....................................................4-12

4-3b Valve Adjusting Spacer Locations (Normally Open Valve)........................................................4-13

4-4 Model Mf51/61 Restrictor Element Assembly............................................................................4-24

4-5 Model Mf51/61 Restrictor Element Orientation in Controller/Meter Body..................................4-25

5-1 Model Mf50/60Parts Drawing .....................................................................................................5-2

5-2 Model Mf51/61 Parts Drawing ....................................................................................................5-3

5-3 Model Mf53/63 Parts Drawing ....................................................................................................5-4

1 2 3 4 5 6 7 8 9 10 11 ... 81 82

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Brooks-instrument Mfi Series Instrukcja Użytkownika Strona 6