Brooks-instrument 5866M Instrukcja Użytkownika

Installation and Operation ManualX-PR-5866E-5866M-engPN 541-C-005-AAAApril, 2008Brooks® Compact Pressure ControllerModel 5866Model 5866

1-7IntroductionFlow Rates0-30,000 sccm* (Nitrogen Equivalent).*Standard pressure and temperature in accordance with SEMI (SemiconductorEquipment and M

Brooks Instrument Model 5866 Pressure Controller1-8Power RequirementsN.C. 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mAN.O. 10.5 watts, ±15

2-1InstallationInstallation2-1 Receipt of EquipmentWhen the equipment is received, the outside packing case should bechecked for damage incurred durin

Brooks Instrument Model 5866 Pressure Controller2-2Prior to installation, insure that all piping is clean and free of obstructions.Install the piping

2-3InstallationSince the Model 5866 Control Valve is not a positive shut-off, aseparate solenoid valve may have been installed for that purpose.It sho

Brooks Instrument Model 5866 Pressure Controller2-4Figure 2-1. Customer Connections and Settings.

2-5InstallationTable 2-1. D-Connector Pin Arrangement.PIN NO. FUNCTION COLOR CODE1 Command Common (Command Pot "CCW") Black2 Voltage Signal

Brooks Instrument Model 5866 Pressure Controller2-62-13 Optional Valve ReturnUnits manufactured after January, 1992 with a Normally Closed valve canbe

3-1OperationOperation3-1 Operationa. Purge the system with dry nitrogen for at least thirty minutes prior tostart-up to prevent the formation of depos

Brooks Instrument Model 5866 Pressure Controller3-2Proportional ControlProportional control is a basic continuous control mode in which thecontroller

iContentsContentsSection 1IntroductionPagePurpose...1-1Description

3-3OperationFigure 3-2. Proportional Control.Figure 3-3. Integral Control.

Brooks Instrument Model 5866 Pressure Controller3-4Figure 3-4. P.I. Control.

4-1MaintenanceMaintenance4-1 GeneralNo routine external maintenance is required for Brooks thermal mass flowcontroller. If an in-line filter is used f

Brooks Instrument Model 5866 Pressure Controller4-2

5-1TroubleshootingTroubleshooting5-1 GeneralIt is important that this controller be serviced only by properlytrained and qualified personnel.CAUTIONA.

Brooks Instrument Model 5866 Pressure Controller5-23. Observe the output signal and, if necessary, perform the zeroadjustment procedure, Section 6.4.

5-3TroubleshootingTable 5-1. Bench Troubleshooting.Trouble Possible Cause Check/Corrective ActionOutput stays at zero Volts regardless of com- Defecti

Brooks Instrument Model 5866 Pressure Controller5-48. Remove the three screws (29) and jack posts (32) attaching theelectronics cover. Remove the elec

5-5Troubleshooting1. Remove the unit from the system.2. Refer to Section 5-3 to disassemble the controller.Do not soak the pressure transducer assembl

Brooks Instrument Model 5866 Pressure Controller5-64. Install the orifice (12) and its O-ring (13) using a 3/8" nut driver. Insurethat the orific

iiBrooks Instrument Model 5866 Mass Flow ControllerSection 6CalibrationPageCalibration Procedure...

5-7TroubleshootingThe valve is adjusted in Brooks pressure controllers by adding spacers (9and 10) to the control valve to vary the initial position o

Brooks Instrument Model 5866 Pressure Controller5-8CAUTIONThe procedure described below requires the disassembly of thecontrol valve. Be certain to re

5-9TroubleshootingFigure 5-3. Valve Adjusting Spacer Locations.

Brooks Instrument Model 5866 Pressure Controller5-10B. Adjustment procedure, Normally Open (N.O.) control valveRefer to Figure 5-4 for spacer location

5-11TroubleshootingFigure 5-4. Valve Adjusting Spacer Locations, Normally Open (N.O.) Valve.

Brooks Instrument Model 5866 Pressure Controller5-129. If the flow shuts off, or is less than the maximum allowable leak throughfor the type of valve

5-13Troubleshooting· For a downstream controller P1 is the reference pressure. P2 is thecalibration pressure.P1=PRefP2=PCal3. Determine the Cv for the

Brooks Instrument Model 5866 Pressure Controller5-14Since the Cv calculated is the same as listed for the .014" orifice the .020"orifice sho

6-1CalibrationCalibration6-1 Calibration ProcedureThe calibration of the Model 5866 Pressure Controller can be divided intothree parts: Transducer Adj

Brooks Instrument Model 5866 Pressure Controller6-2Note: If a vacuum pump is not available and the atmospheric pressureis accurately known the zero pr

1-1IntroductionIntroduction1-1 PurposeThis instruction manual is intended to provide the user with all theinformation necessary to install, operate an

6-3CalibrationWhere,P1 = percentage (%) of gas 1 (by volume)P2 = percentage (%) of gas 2 (by volume)Pn = percentage (%) of gas n (by volume)Example: T

Brooks Instrument Model 5866 Pressure Controller6-4GAS NAME FORMULA SENSOR ORIFICE DENSITYFACTOR FACTOR (kg/m3)Acetylene C2H20.615 0.970 1.173Air Mi

6-5CalibrationGAS NAME FORMULA SENSOR ORIFICE DENSITYFACTOR FACTOR (kg/m3)Hydrogen H21.008 0.269 0.090Hydrogen Bromide HBr 0.987 1.695 3.645Hydrogen

Brooks Instrument Model 5866 Pressure Controller6-6

7-1Parts ListParts List7-1 GeneralReplacement parts for the Model 5866 are readily available worldwidethrough the factories and customer service facil

Brooks Instrument Model 5866 Pressure Controller7-2Figure 7-1. Model 5866E Parts Drawing.

7-3Parts ListTable 7-1. Model 5866E Parts List.ItemNo. Qty. Description Part Number1 1 Jam Nut 573-B-027-ACK2 1 Coil Assembly S-185-Z-271-AAA3 6 Valve

Brooks Instrument Model 5866 Pressure Controller7-4Figure 7-2. Model 5866M Parts Drawing.

7-5Parts ListTable 7-3. Model 5866M Parts List.

Brooks Instrument Model 5866 Pressure Controller7-6

Brooks Instrument Model 5866 Pressure Controller1-2Figure 1-1. Model 5866 PressureTransducer.Figure 1-2. Model 5866 Silicon ChipConfiguration.Figure 1

Model 5866Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007A-1Section A, CE Certification ofMass Flow EquipmentBulgarianBrooks In

Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007Model 5866A-2Section A, CE Certification ofMass Flow EquipmentDanskBrooks Instru

Model 5866Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007A-3Section A, CE Certification ofMass Flow EquipmentEnglishBrooks Inst

Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007Model 5866A-4Section A, CE Certification ofMass Flow EquipmentEspañolBrooks Inst

Model 5866Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007A-5Section A, CE Certification ofMass Flow EquipmentGreekBrooks Instru

Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007Model 5866A-6Section A, CE Certification ofMass Flow EquipmentItalianoBrooks Ins

Model 5866Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007A-7Section A, CE Certification ofMass Flow EquipmentMagyarBrooks Instr

Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007Model 5866A-8Section A, CE Certification ofMass Flow EquipmentNorskBrooks Instru

Model 5866Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007A-9Section A, CE Certification ofMass Flow EquipmentPolskiBrooks Instr

Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007Model 5866A-10Section A, CE Certification ofMass Flow EquipmentSlovenskoBrooks I

1-3IntroductionFigure 1-4. Model 5866Dimensions.Connection "A" Dim.1/4" (M) VCR 4.88/124.01/4" (M) VCO 4.56/115.81/8" Compres

Model 5866Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007A-11Section A, CE Certification ofMass Flow EquipmentSlovenskyBrooks I

Installation and Operation Manual541-C-005-AAA Rev D/ DRAFTApril, 2007Model 5866A-12Section A, CE Certification ofMass Flow EquipmentSvenskBrooks Inst

1AddendumApril 5, 2004Attach to the following publications:X-5850EM, December 1998, Issue 3X-5964, dated April 1996, Issue 2X-5866, dated April 1998,

2AddendumApril 5, 2004Attach to the following publications: X-5850EM, December 1998, Issue 3X-5964, dated April 1996, Issue 2X-5866, dated April 1998,

3AddendumApril 5, 2004Attach to the following publications:X-5850EM, December 1998, Issue 3X-5964, dated April 1996, Issue 2X-5866, dated April 1998,

Installation and Operation ManualX-PR-5866E-5866M-engPN 541-C-005-AAAApril, 2008Model 5866LIMITED WARRANTYSeller warrants that the Goods manufactured

Brooks Instrument Model 5866 Pressure Controller1-4When the pressure controller is used in the “downstream pressureregulation” mode as shown in Figure

1-5IntroductionUpstream Controller Mode sets the controller to maintain the upstreamprocess pressure constant, independent of downstream pressure or f

Brooks Instrument Model 5866 Pressure Controller1-6Valve Override permits the user to fully open and close the valveindependent of the command setting